Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, Fla.
CRC Press
c2005.
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| Edition: | 2nd ed. |
| Series: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Subjects: |