Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| Hoofdauteur: | |
|---|---|
| Formaat: | Boek |
| Taal: | English |
| Gepubliceerd in: |
Boca Raton, Fla.
CRC Press
c2005.
|
| Editie: | 2nd ed. |
| Reeks: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Onderwerpen: |