Semiconductor fabrication technology and metrology

Semiconductor fabrication technology and metrology

Bibliographic Details
Corporate Authors: ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute, Symposium on Semiconductor Processing
Other Authors: Gupta, D. C. (Dinesh C.)
Format: Book
Language:English
Published: Philadelphia, PA ASTM c1989.
Series:ASTM special technical publication 990.
Subjects:
Semiconductors > Design and construction > Congresses.