MEMS applications

Bibliografske podrobnosti
Drugi avtorji:	Gad-el-Hak, Mohamed 1945-
Format:	Knjiga
Jezik:	English
Izdano:	Boca Raton, Fla. CRC Press/Taylor & Francis c2006.
Izdaja:	2nd ed.
Teme:	Microelectromechanical systems. Detectors. Microactuators. Robots.