Plasma deposition of amorphous silicon-based materials.

Bibliografiska uppgifter
Huvudupphovsman:	Bruno, Giovanni
Materialtyp:	Bok
Språk:	English
Publicerad:	Boston Academic Press 1995
Serie:	Plasma--materials interactions
Ämnen:	Amorphous semiconductors > Design and construction. Plasma-enhanced chemical vapor deposition. Silicon alloys.