Plasma deposition of amorphous silicon-based materials.

Plasma deposition of amorphous silicon-based materials.

Bibliografske podrobnosti
Glavni avtor: Bruno, Giovanni
Format: Knjiga
Jezik:English
Izdano: Boston Academic Press 1995
Serija:Plasma--materials interactions
Teme:
Amorphous semiconductors > Design and construction.
Plasma-enhanced chemical vapor deposition.
Silicon alloys.