Plasma deposition of amorphous silicon-based materials.

Plasma deposition of amorphous silicon-based materials.

Detalhes bibliográficos
Autor principal: Bruno, Giovanni
Formato: Livro
Idioma:English
Publicado em: Boston Academic Press 1995
coleção:Plasma--materials interactions
Assuntos:
Amorphous semiconductors > Design and construction.
Plasma-enhanced chemical vapor deposition.
Silicon alloys.