Plasma deposition of amorphous silicon-based materials.
| Príomhchruthaitheoir: | |
|---|---|
| Formáid: | LEABHAR |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
Boston
Academic Press
1995
|
| Sraith: | Plasma--materials interactions
|
| Ábhair: |