Plasma deposition of amorphous silicon-based materials.

Plasma deposition of amorphous silicon-based materials.

Xehetasun bibliografikoak
Egile nagusia: Bruno, Giovanni
Formatua: Liburua
Hizkuntza:English
Argitaratua: Boston Academic Press 1995
Saila:Plasma--materials interactions
Gaiak:
Amorphous semiconductors > Design and construction.
Plasma-enhanced chemical vapor deposition.
Silicon alloys.