Plasma deposition of amorphous silicon-based materials.

Detalles Bibliográficos
Autor principal:	Bruno, Giovanni
Formato:	Libro
Lenguaje:	English
Publicado:	Boston Academic Press 1995
Colección:	Plasma--materials interactions
Materias:	Amorphous semiconductors > Design and construction. Plasma-enhanced chemical vapor deposition. Silicon alloys.