Plasma deposition of amorphous silicon-based materials.

Plasma deposition of amorphous silicon-based materials.

Bibliografiske detaljer
Hovedforfatter: Bruno, Giovanni
Format: Bog
Sprog:English
Udgivet: Boston Academic Press 1995
Serier:Plasma--materials interactions
Fag:
Amorphous semiconductors > Design and construction.
Plasma-enhanced chemical vapor deposition.
Silicon alloys.