Plasma deposition of amorphous silicon-based materials.

Podrobná bibliografie
Hlavní autor:	Bruno, Giovanni
Médium:	Kniha
Jazyk:	English
Vydáno:	Boston Academic Press 1995
Edice:	Plasma--materials interactions
Témata:	Amorphous semiconductors > Design and construction. Plasma-enhanced chemical vapor deposition. Silicon alloys.