Integrated circuits chemical and physical processing

Bibliographische Detailangaben
1. Verfasser:	Stroeve, Pieter, 1945-
Körperschaft:	American Chemical Society. Division of Industrial and Engineering Chemistry
Format:	Buch
Sprache:	English
Veröffentlicht:	Washington, D.C. American Chemical Society 1985
Schriftenreihe:	ACS symposium series nACS symposium series
Schlagworte:	Integrated circuits -- Very large scale integration -- Design and construction > Congresses.