Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Detaylı Bibliyografya
Yazar: Venezuela, Jeffrey De Guzman
Materyal Türü: Tez
Dil:English
Baskı/Yayın Bilgisi: 2003.
Konular:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.