Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliografske podrobnosti
Glavni avtor: Venezuela, Jeffrey De Guzman
Format: Thesis
Jezik:English
Izdano: 2003.
Teme:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.