Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Detalhes bibliográficos
Autor principal: Venezuela, Jeffrey De Guzman
Formato: Thesis
Idioma:English
Publicado em: 2003.
Assuntos:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.