Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Opis bibliograficzny
1. autor: Venezuela, Jeffrey De Guzman
Format: Praca dyplomowa
Język:English
Wydane: 2003.
Hasła przedmiotowe:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.