Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliografische gegevens
Hoofdauteur: Venezuela, Jeffrey De Guzman
Formaat: Thesis
Taal:English
Gepubliceerd in: 2003.
Onderwerpen:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.