Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

書誌詳細
第一著者: Venezuela, Jeffrey De Guzman
フォーマット: 学位論文
言語:English
出版事項: 2003.
主題:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.