Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Dettagli Bibliografici
Autore principale: Venezuela, Jeffrey De Guzman
Natura: Tesi
Lingua:English
Pubblicazione: 2003.
Soggetti:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.