Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliografski detalji
Glavni autor: Venezuela, Jeffrey De Guzman
Format: Disertacija
Jezik:English
Izdano: 2003.
Teme:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.