Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

ग्रंथसूची विवरण
मुख्य लेखक: Venezuela, Jeffrey De Guzman
स्वरूप: थीसिस
भाषा:English
प्रकाशित: 2003.
विषय:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.