Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Xehetasun bibliografikoak
Egile nagusia: Venezuela, Jeffrey De Guzman
Formatua: Thesis
Hizkuntza:English
Argitaratua: 2003.
Gaiak:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.