Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Dades bibliogràfiques
Autor principal: Venezuela, Jeffrey De Guzman
Format: Thesis
Idioma:English
Publicat: 2003.
Matèries:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.