Handbook of VLSI microlithography principles, technology, and applications

Handbook of VLSI microlithography principles, technology, and applications

Zobrazit všechna vydaní (2)
Podrobná bibliografie
Další autoři: Glendinning, William B., Helbert, John N.
Médium: Kniha
Jazyk:English
Vydáno: Park Ridge, N.J. Noyes Publications c1991.
Témata:
Integrated circuits - Very large scale integration.
Microlithography.
On-line přístup:Also available online for University of the Philippines Diliman via ScienceDirect. Click here to access