Handbook of VLSI microlithography principles, technology, and applications

Detaylı Bibliyografya
Diğer Yazarlar:	Glendinning, William B., Helbert, John N.
Materyal Türü:	Kitap
Dil:	English
Baskı/Yayın Bilgisi:	Park Ridge, N.J. Noyes Publications c1991.
Konular:	Integrated circuits - Very large scale integration. Microlithography.
Online Erişim:	Also available online for University of the Philippines Diliman via ScienceDirect. Click here to access