Handbook of VLSI microlithography principles, technology, and applications

Библиографические подробности
Другие авторы:	Glendinning, William B., Helbert, John N.
Формат:	‌
Язык:	English
Опубликовано:	Park Ridge, N.J. Noyes Publications c1991.
Предметы:	Integrated circuits - Very large scale integration. Microlithography.
Online-ссылка:	Also available online for University of the Philippines Diliman via ScienceDirect. Click here to access