Handbook of multilevel metallization for integrated circuits materials, technology, and applications

Handbook of multilevel metallization for integrated circuits materials, technology, and applications

Dettagli Bibliografici
Altri autori: Wilson, Syd R., Tracy, Clarence J., Freeman, John L.
Natura: Libro
Lingua:English
Pubblicazione: Park Ridge, N.J. Noyes c1993.
Soggetti:
Integrated circuits > Design and construction.
Metallizing.