APA (7th ed.) Citation

Wilson, S. R., Tracy, C. J., & Freeman, J. L. (1993). Handbook of multilevel metallization for integrated circuits: Materials, technology, and applications. Noyes.

Chicago Style (17th ed.) Citation

Wilson, Syd R., Clarence J. Tracy, and John L. Freeman. Handbook of Multilevel Metallization for Integrated Circuits: Materials, Technology, and Applications. Park Ridge, N.J: Noyes, 1993.

MLA (9th ed.) Citation

Wilson, Syd R., et al. Handbook of Multilevel Metallization for Integrated Circuits: Materials, Technology, and Applications. Noyes, 1993.