Handbook of sputter deposition technology principles, technology, and applications

Handbook of sputter deposition technology principles, technology, and applications

Manylion Llyfryddiaeth
Prif Awdur: Wasa, Kiyotaka
Awduron Eraill: Hayakawa, Shigeru 1925-
Fformat: Llyfr
Iaith:English
Cyhoeddwyd: Park Ridge, N.J. Noyes Publications c1992.
Pynciau:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.