Handbook of sputter deposition technology principles, technology, and applications

Dades bibliogràfiques
Autor principal:	Wasa, Kiyotaka
Altres autors:	Hayakawa, Shigeru 1925-
Format:	Llibre
Idioma:	English
Publicat:	Park Ridge, N.J. Noyes Publications c1992.
Matèries:	Cathode sputtering (Plating process) > Handbooks, manuals, etc. Thin films > Handbooks, manuals, etc.