Handbook of sputter deposition technology principles, technology, and applications

Detalles Bibliográficos
Autor Principal:	Wasa, Kiyotaka
Outros autores:	Hayakawa, Shigeru 1925-
Formato:	Libro
Idioma:	English
Publicado:	Park Ridge, N.J. Noyes Publications c1992.
Subjects:	Cathode sputtering (Plating process) > Handbooks, manuals, etc. Thin films > Handbooks, manuals, etc.