Handbook of sputter deposition technology principles, technology, and applications

Détails bibliographiques
Auteur principal:	Wasa, Kiyotaka
Autres auteurs:	Hayakawa, Shigeru 1925-
Format:	Livre
Langue:	English
Publié:	Park Ridge, N.J. Noyes Publications c1992.
Sujets:	Cathode sputtering (Plating process) > Handbooks, manuals, etc. Thin films > Handbooks, manuals, etc.