Handbook of sputter deposition technology principles, technology, and applications

Handbook of sputter deposition technology principles, technology, and applications

Bibliografiske detaljer
Hovedforfatter: Wasa, Kiyotaka
Andre forfattere: Hayakawa, Shigeru 1925-
Format: Bog
Sprog:English
Udgivet: Park Ridge, N.J. Noyes Publications c1992.
Fag:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.