Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

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Detalhes bibliográficos
Autor principal: Sivaram, S.
Formato: Livro
Idioma:English
Publicado em: N.Y. Van Nostrand Reinhold c1995.
Assuntos:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.