Metallization theory and practice for VLSI and ULSI

Metallization theory and practice for VLSI and ULSI

Sonraí bibleagrafaíochta
Príomhchruthaitheoir: Murarka, S. P.
Formáid: LEABHAR
Teanga:English
Foilsithe / Cruthaithe: Boston Butterworth-Heinemann c1993.
Ábhair:
Integrated circuits > Very large scale integration.
Metallizing.