Murarka, S. P. (1993). Metallization: Theory and practice for VLSI and ULSI. Butterworth-Heinemann.
Chicago Style (17th ed.) CitationMurarka, S. P. Metallization: Theory and Practice for VLSI and ULSI. Boston: Butterworth-Heinemann, 1993.
MLA (9th ed.) CitationMurarka, S. P. Metallization: Theory and Practice for VLSI and ULSI. Butterworth-Heinemann, 1993.
Warning: These citations may not always be 100% accurate.