Polymeric materials for microelectronic applications science and technology

Bibliografiska uppgifter
Institutionella upphovsmän:	Kobunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group, American Chemical Society. Division of Polymeric Materials: Science and Engineering
Övriga upphovsmän:	Ito, Hiroshi, Tagawa, Seichi, Horie, Kazuyuki 1941-
Materialtyp:	Bok
Språk:	engelska
Publicerad:	Washington, DC American Chemical Society 1994.
Serie:	ACS symposium series 579
Ämnen:	Microelectronics > Materials > Congresses. Polymers > Congresses.