Introduction to microelectronic fabrication

Détails bibliographiques
Auteur principal:	Jaeger, Richard C.
Format:	Livre
Langue:	English
Publié:	Upper Saddle River, N.J. Prentice Hall c2002.
Édition:	2nd ed.
Collection:	Modular series on solid state devices v. 5
Sujets:	Integrated circuits > Very large scale integration > Design and construction > Textbooks.