Jaeger, R. C. (2002). Introduction to microelectronic fabrication (2nd ed.). Prentice Hall.
Cita Chicago Style (17a ed.)Jaeger, Richard C. Introduction to Microelectronic Fabrication. 2nd ed. Upper Saddle River, N.J: Prentice Hall, 2002.
Cita MLA (9a ed.)Jaeger, Richard C. Introduction to Microelectronic Fabrication. 2nd ed. Prentice Hall, 2002.
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