Handbook of microlithography, micromachining, and microfabrication
| अन्य लेखक: | |
|---|---|
| स्वरूप: | पुस्तक |
| भाषा: | English |
| प्रकाशित: |
Bellingham, Wash.
SPIE Optical Engineering Press
c1997.
|
| श्रृंखला: | SPIE Press monograph
PM39-PM40--IEE materials and devices series 12A-12B |
| विषय: |