Handbook of microlithography, micromachining, and microfabrication
| Rannpháirtithe: | |
|---|---|
| Formáid: | LEABHAR |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
Bellingham, Wash.
SPIE Optical Engineering Press
c1997.
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| Sraith: | SPIE Press monograph
PM39-PM40--IEE materials and devices series 12A-12B |
| Ábhair: |