Handbook of microlithography, micromachining, and microfabrication
| Beste egile batzuk: | |
|---|---|
| Formatua: | Liburua |
| Hizkuntza: | ingelesa |
| Argitaratua: |
Bellingham, Wash.
SPIE Optical Engineering Press
c1997.
|
| Saila: | SPIE Press monograph
PM39-PM40--IEE materials and devices series 12A-12B |
| Gaiak: |