Micromechanics and MEMS classic and seminal papers to 1990

Detalles Bibliográficos
Autor Corporativo:	Institute of Electrical and Electronics Engineers
Otros Autores:	Trimmer, W.
Formato:	Libro
Lenguaje:	English
Publicado:	New York IEEE Press c1997.
Materias:	Microelectronics. Electromechanical devices. Microelectromechanical systems. Actuators.