Micromechanics and MEMS classic and seminal papers to 1990

Dades bibliogràfiques
Autor corporatiu:	Institute of Electrical and Electronics Engineers
Altres autors:	Trimmer, W.
Format:	Llibre
Idioma:	English
Publicat:	New York IEEE Press c1997.
Matèries:	Microelectronics. Electromechanical devices. Microelectromechanical systems. Actuators.