Micromechanics and MEMS classic and seminal papers to 1990

Bibliographic Details
Corporate Author:	Institute of Electrical and Electronics Engineers
Other Authors:	Trimmer, W.
Format:	Book
Language:	English
Published:	New York IEEE Press c1997.
Subjects:	Microelectronics. Electromechanical devices. Microelectromechanical systems. Actuators.