Micromechanics and MEMS classic and seminal papers to 1990

Bibliografski detalji
Autor kompanije:	Institute of Electrical and Electronics Engineers
Daljnji autori:	Trimmer, W.
Format:	Knjiga
Jezik:	English
Izdano:	New York IEEE Press c1997.
Teme:	Microelectronics. Electromechanical devices. Microelectromechanical systems. Actuators.