Parametric investigation of thermal vacuum evaporation of aluminum and silver thin films on silicon substrate
Aluminum and silver films were deposited using the JEE 4x thermal vacuum evaporator of the Department of Mining, Metallurgical and Materials Engineering, University of the Philippines. The deposited films were characterized in terms of sheet resistance, morphology, thickness, crystal orientation, an...
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
c2004.
|
| Subjects: |