Formation of titanium nitride (TIN) on metal substrates using a magnetized sheet plasma

Formation of titanium nitride (TIN) on metal substrates using a magnetized sheet plasma

Detalhes bibliográficos
Autor principal: Labis, Joselito P.
Formato: Tese
Idioma:English
Assuntos:
Plasma sheaths.
Nitrides.
Plasma (Ionized gases).
Titanium nitride.