Formation of titanium nitride (TIN) on metal substrates using a magnetized sheet plasma

Manylion Llyfryddiaeth
Prif Awdur:	Labis, Joselito P.
Fformat:	Traethawd Ymchwil
Iaith:	English
Pynciau:	Plasma sheaths. Nitrides. Plasma (Ionized gases). Titanium nitride.