APA (7th ed.) Citation

Absin, R. S. Titanium nitride (TiN) thin films grown by DC/RF planar magnetron sputtering.

Chicago Style (17th ed.) Citation

Absin, Rex S. Titanium Nitride (TiN) Thin Films Grown by DC/RF Planar Magnetron Sputtering.

MLA (9th ed.) Citation

Absin, Rex S. Titanium Nitride (TiN) Thin Films Grown by DC/RF Planar Magnetron Sputtering.

Warning: These citations may not always be 100% accurate.