Titanium nitride (TiN) thin films grown by DC/RF planar magnetron sputtering

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Titanium nitride (TiN) thin films grown by DC/RF planar magnetron sputtering

Bibliographic Details
Main Author:	Absin, Rex S.
Format:	Book
Language:	English
Subjects:	Sputtering (Physics). Thin films. Titanium nitride.

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