Introduction to microelectronic fabrication Richard C. Jaeger.

Bibliographische Detailangaben
1. Verfasser:	Jaeger, Richard C.
Format:	Buch
Veröffentlicht:	Reading, Mass. Addison-Wesley c1988.
Schriftenreihe:	Modular series on solid state devices v. 5
Schlagworte:	Integrated circuits > Very large scale integration > Design and construction > Congresses.